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TESCOM 64-3400系列 减压调压阀-
艾默生
EMERSON
TESCOM 64-3400 Series dual-stage, ultra high purity pressure reducing regulator offers a tied diaphragm design and 10 Ra microinch / 0.25 micrometer surface finish with optional Hastelloy? trim. Inlet pressure is 3500 psig / 241 bar with outlet pressures up to 150 psig / 10.3 bar.
Applications
? Gas cabinets
? Semiconductor manufacturing
? Research labs
Features and Benefits
? 10 Ra microinch / 0.25 micrometer internal surfaces
? Full internal Electropolish is available
?
Meta
l-to-
meta
l body to diaphragm seal for high leak integrity
? Choice of free poppet or tied diaphragm
