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TESCOM 64-5000系列 减压调压阀-尼得科EMERSON
TESCOM 64-5000 Series ultra high purity, absolute/ subatmospheric pressure reducing regulator offers a 10 Ra surface finish. Inlet pressures are 120, 600, or 3500 psig / 8.3, 41.4, or 241 bar with outlet pressures ranges from 50 mm Hg absolute - 15 to 100 psig / 50 mm Hg absolute - 1.0 to 6.9 bar.
Applications
? Vacuum pressure control
? Toxic gas analysis
? Valve manifold boxes
? Gas cabinets
? Semiconductor manufacturing
Features and Benefits
? Negative bias for controlling vacuum and low positive pressures
? 10 Ra microinch / 0.25 micrometer internals urface finish
?
Meta
l-to-
meta
l diaphragm to body seal for high leak integrity
? Hastelloy? trim option is available
