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TESCOM 64-3200系列 减压调压阀-
艾默生
EMERSON
TESCOM 64-3200 Series ultra high purity, high flow tied diaphragm pressure reducing regulator offers 10 Ra microinch / 0.25 micrometer surface finish and is available in Hastelloy? trim. Maximum flow rates are up to 31.8 SCFM / 900 SLPM, with inlet pressures of 150, 1000, 1500 psig / 10.3, 69.0, 103 bar and outlet pressures up to 200 psig / 13.8 bar.
Applications
? Bulk Specialty Gas Systems (BSGS)
? 1/2" point-of-use
? Tool hookups
? Gas cabinets
Features and Benefits
? Designed for high flow, bulk specialty gas
? Hastelloy? trim option is available
? Positive shut-off seal, tied diaphragm design
?
Meta
l-to-
meta
l diaphragm to body seal for high leak integrity
? Captured bonnet
